Resonant Magnetic Field Sensors Based On MEMS Technology
نویسندگان
چکیده
منابع مشابه
Resonant Magnetic Field Sensors Based On MEMS Technology
Microelectromechanical systems (MEMS) technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors e...
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ژورنال
عنوان ژورنال: Sensors
سال: 2009
ISSN: 1424-8220
DOI: 10.3390/s91007785